专利内容由知识产权出版社提供
专利名称：MANUFACTURING METHOD OF
MICROSTRUCTURE
发明人：Yung-Chun LEE,Chi-Cheng CHIU,Chih-Hao
CHANG,Ching-Yun LU
申请号：US13850467申请日：20130326
公开号：US20140295354A1公开日：20141002
专利附图：
摘要：A manufacturing method of microstructure comprises steps of: a motiondetermination step which determines the motion of a substrate relative to at least a
photomask; a microlens determination step which determines the profile of a microlensunit on the substrate; an analysis step which calculates the feature of the photomaskaccording to the motion of the substrate and the profile of the microlens unit by using anumerical analysis method; a production step which produces the photomask accordingto the feature of the photomask; driving the substrate to do the motion determined inthe motion determination step, and meanwhile making a laser light illuminate thesubstrate through the photomask to manufacture the microlens unit on the substrate bythe superposition effect of the laser light; and performing a photolithography process byusing the microlens unit to produce a microstructure on a photoresist substrate.
申请人：NATIONAL CHENG KUNG UNIVERSITY
地址：Tainan City TW
国籍：TW
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