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专利名称：Method and apparatus for assembling an
array of micro-devices
发明人：Patrick E. Feierabend,John S. Foster,Richard
T. Martin,Paul J. Rubel,John W.
Stocker,Jeffery F. Summers,Andrew D. Wallis
申请号：US112726申请日：20051115公开号：US07141080B2公开日：20061128
专利附图：
摘要：The invention describes a method and apparatus for deploying micromachined
actuators in a plane which is orthogonal to the original fabrication plane of the devices.Using batch-processing, photolithographic procedures known in the micromachinedelectro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitablesubstrate. The devices are then separated one from another by sawing and dicing theoriginal fabrication wafer. The devices are rotated into an orthogonal orientation andaffixed to a second wafer. The second wafer also contains circuitry for addressing andmanipulating each of the devices independently of the others. With this method andapparatus, arrays of actuators are constructed whose plane of actuation is perpendicularto the plane of the array. This invention is useful for constructing N×M fiber opticswitches, which direct light from N input fibers into M output fibers.
申请人：Patrick E. Feierabend,John S. Foster,Richard T. Martin,Paul J. Rubel,John W.Stocker,Jeffery F. Summers,Andrew D. Wallis
地址：Santa Barbara CA US,Santa Barbara CA US,Goleta CA US,Santa Barbara CAUS,Santa Barbara CA US,Santa Barbara CA US,Los Alamos CA US
国籍：US,US,US,US,US,US,US
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